Fabrication of clamped-clamped microbeams with embedded nanochannels towards nanoparticles sensing
Davide Scaiola  1, 2@  , Stefano Stassi  1  , Philippe Renaud  2  , Carlo Ricciardi  1  
1 : DISAT - Politecnico di Torino
2 : EPFL-STI-IMT-LMIS4

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