Fabrication of clamped-clamped microbeams with embedded nanochannels towards nanoparticles sensing
1 : DISAT - Politecnico di Torino
2 : EPFL-STI-IMT-LMIS4
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Fabrication of clamped-clamped microbeams with embedded nanochannels towards nanoparticles sensing
1 : DISAT - Politecnico di Torino
2 : EPFL-STI-IMT-LMIS4
|